Tokyo Electron Limited patent applications published on November 30th, 2023
Contents
- 1 Patent applications for tokyo electron limited on November 30th, 2023
- 1.1 SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD (18322855)
- 1.2 SUBSTRATE PROCESSING APPARATUS (18324469)
- 1.3 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18032786)
- 1.4 Systems and Methods for Plasma Process (17804496)
- 1.5 PLASMA PROCESSING APPARATUS (18249552)
- 1.6 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18231278)
- 1.7 SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ALIGNING RING MEMBER (18199401)
- 1.8 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18200910)
- 1.9 PLASMA PROCESSING APPARATUS (18251077)
- 1.10 PLASMA PROCESSING APPARATUS (18232834)
- 1.11 SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18248900)
- 1.12 WARPAGE AMOUNT ESTIMATION APPARATUS AND WARPAGE AMOUNT ESTIMATION METHOD (18249630)
Patent applications for tokyo electron limited on November 30th, 2023
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD (18322855)
Main Inventor
Yoshiki Okamoto
SUBSTRATE PROCESSING APPARATUS (18324469)
Main Inventor
Naoki UMEHARA
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18032786)
Main Inventor
Atsutoshi INOKUCHI
Systems and Methods for Plasma Process (17804496)
Main Inventor
Charles Schlechte
PLASMA PROCESSING APPARATUS (18249552)
Main Inventor
Taro IKEDA
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18231278)
Main Inventor
Satoru NAKAMURA
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ALIGNING RING MEMBER (18199401)
Main Inventor
Mohd Fairuz BIN BUDIMAN
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18200910)
Main Inventor
Tomohiko NIIZEKI
PLASMA PROCESSING APPARATUS (18251077)
Main Inventor
Tsuyoshi Moriya
PLASMA PROCESSING APPARATUS (18232834)
Main Inventor
Toshimasa KOBAYASHI
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18248900)
Main Inventor
Koji Kagawa
WARPAGE AMOUNT ESTIMATION APPARATUS AND WARPAGE AMOUNT ESTIMATION METHOD (18249630)
Main Inventor
Akiko KIYOTOMI