Information for "18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.)"
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| Display title | 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) |
| Default sort key | 18336217. SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING THE SAME, AND A METHOD OF PROCESSING A SUBSTRATE USING THE SUBSTRATE PROCESSING SYSTEM simplified abstract (Samsung Electronics Co., Ltd.) |
| Page length (in bytes) | 3,503 |
| Page ID | 55320 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Counted as a content page | Yes |
Page protection
| Edit | Allow all users (infinite) |
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Edit history
| Page creator | Wikipatents (talk | contribs) |
| Date of page creation | 08:35, 31 May 2024 |
| Latest editor | Wikipatents (talk | contribs) |
| Date of latest edit | 08:35, 31 May 2024 |
| Total number of edits | 1 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
