ANTI-PLASMA COATING

Organization Name

taiwan semiconductor manufacturing company, ltd.

Inventor(s)

Chih-Kai Hu of Taoyuan County TW

Ren-Guan Duan of Hsinchu City TW

Chiun-Da Shiue of Hsinchu County TW

Chin-Han Meng of Hsinchu City TW

ANTI-PLASMA COATING

This abstract first appeared for US patent application 20250149302 titled 'ANTI-PLASMA COATING

Original Abstract Submitted

an anti-plasma coating formed on a surface of a component in a plasma chamber includes an insulation layer on the surface and a plasma-resistant layer on the insulation layer. the plasma-resistant layer includes one or more stacks, where each stack includes a crystalline layer and an amorphous layer. the anti-plasma coating improves a lifetime of the component in the plasma chamber with high-energy plasma sources.