Taiwan semiconductor manufacturing company, ltd. (20250068088). STORAGE FOR EXTREME ULTRAVIOLET LIGHT LITHOGRAPHY
STORAGE FOR EXTREME ULTRAVIOLET LIGHT LITHOGRAPHY
Organization Name
taiwan semiconductor manufacturing company, ltd.
Inventor(s)
Ching-Jung Chang of Hsinchu (TW)
Hsiang-Yin Shen of Hsinchu (TW)
STORAGE FOR EXTREME ULTRAVIOLET LIGHT LITHOGRAPHY
This abstract first appeared for US patent application 20250068088 titled 'STORAGE FOR EXTREME ULTRAVIOLET LIGHT LITHOGRAPHY
Original Abstract Submitted
an euv stocker and an euv pod device is disclosed. the euv stocker includes an ai driven dynamic control circuitry, an ai controlled safety interlock, and an independent air return control device. the euv stocker includes a mass flow control (mfc) that operates in conjunction with one or more valves. the euv stocker further includes a hydrocarbon detecting assembly, oxygen detecting assembly, pressure detecting assembly, and temperature detecting assembly and more to maintain the required condition within the euv stocker. the euv stocker also includes automated transportation devices such as amhs, oht, mr, agv, rgv, or the like to provide a safe euv mask storage environment for operators.