20250216188. Calibration In-plane Disto (KLA)
CALIBRATION FOR IN-PLANE DISTORTION TOOL-TO-TOOL MATCHING
Abstract: a shape map can be extracted for a workpiece, such as a semiconductor wafer. a calibration map of the workpiece can be extracted from this shape map to generate a calibrated shape map. in-plane distortion matching can be performed using the calibrated shape map. the in-plane distortion matching can be performed between two metrology tools.
Inventor(s): Wenjiang Guo, Chenkoon Toh, David Owen
CPC Classification: G01B9/02072 (Interferometers)
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