SUBSTRATE TRANSPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

Abstract: in a case where both of a first sensor and a second sensor respectively sense that a substrate is placed on a first guide and a second guide, a pusher is allowed to change from an open state to a closed state. on the other hand, in a case where at least one of the first sensor and the second sensor does not sense the substrate, the pusher is prohibited from changing from the open state to the closed state.

Inventor(s): Takuya SATO, Hiroyuki KAWAHARA, Yuichi TAKAYAMA

CPC Classification: H01L21/68 (for positioning, orientation or alignment)

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