20250162860. Methods (The University of British Columbia)
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
Abstract: according to at least one embodiment, methods of fabricating micro electro-mechanical systems (mems) structures involving lamination of an electromechanical layer to a micromechanical structure are disclosed.
Inventor(s): Chang GE, Edmond CRETU
CPC Classification: B81C1/00158 (Manufacture or treatment of devices or systems in or on a substrate ( takes precedence))
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