US Patent Application 18299319. FOREIGN PARTICLE REMOVING METHOD, FORMATION METHOD, ARTICLE MANUFACTURING METHOD, FOREIGN PARTICLE REMOVING APPARATUS, SYSTEM, AND TEMPLATE simplified abstract
FOREIGN PARTICLE REMOVING METHOD, FORMATION METHOD, ARTICLE MANUFACTURING METHOD, FOREIGN PARTICLE REMOVING APPARATUS, SYSTEM, AND TEMPLATE
Organization Name
Inventor(s)
Hisanobu Azuma of Kanagawa (JP)
FOREIGN PARTICLE REMOVING METHOD, FORMATION METHOD, ARTICLE MANUFACTURING METHOD, FOREIGN PARTICLE REMOVING APPARATUS, SYSTEM, AND TEMPLATE - A simplified explanation of the abstract
This abstract first appeared for US patent application 18299319 titled 'FOREIGN PARTICLE REMOVING METHOD, FORMATION METHOD, ARTICLE MANUFACTURING METHOD, FOREIGN PARTICLE REMOVING APPARATUS, SYSTEM, AND TEMPLATE
Simplified Explanation
The present invention is a method for removing foreign particles from a first member.
- A composition is supplied to a specific region on the first member.
- A second member is pressed against the composition on the first member.
- The composition is cured on the first member while in contact with the second member.
- The second member and the composition adhere to each other.
- The second member is then separated from the first member, removing the composition and any foreign particles from the target region.
Original Abstract Submitted
The present invention provides a foreign particle removing method of removing a foreign particle on a first member, comprising: supplying a composition to a supply region on the first member; setting a target region wider than the supply region on the first member, and pressing a second member against the composition supplied on the first member in the supplying; curing the composition on the first member after the pressing, in a state in which the composition and the second member are in contact with each other; and separating the second member from the first member after the curing, in a state in which the second member and the composition adhere to each other, thereby separating the composition from the target region of the first member.
