Tokyo Electron Limited patent applications published on November 30th, 2023

Patent applications for Tokyo Electron Limited on November 30th, 2023

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD (18322855)

Main Inventor

Yoshiki Okamoto

SUBSTRATE PROCESSING APPARATUS (18324469)

Main Inventor

Naoki UMEHARA

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18032786)

Main Inventor

Atsutoshi INOKUCHI

Systems and Methods for Plasma Process (17804496)

Main Inventor

Charles Schlechte

PLASMA PROCESSING APPARATUS (18249552)

Main Inventor

Taro IKEDA

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18231278)

Main Inventor

Satoru NAKAMURA

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR ALIGNING RING MEMBER (18199401)

Main Inventor

Mohd Fairuz BIN BUDIMAN

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18200910)

Main Inventor

Tomohiko NIIZEKI

PLASMA PROCESSING APPARATUS (18251077)

Main Inventor

Tsuyoshi Moriya

PLASMA PROCESSING APPARATUS (18232834)

Main Inventor

Toshimasa KOBAYASHI

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18248900)

Main Inventor

Koji Kagawa

WARPAGE AMOUNT ESTIMATION APPARATUS AND WARPAGE AMOUNT ESTIMATION METHOD (18249630)

Main Inventor

Akiko KIYOTOMI