Difference between revisions of "Tokyo Electron Limited patent applications published on April 11th, 2024"

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'''Summary of the patent applications from Tokyo Electron Limited on April 11th, 2024'''
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Tokyo Electron Limited has recently filed patents related to motor control methods for object transfer in substrate processing apparatus, fabrication of transistors with nanosheets surrounded by shell material, and transistor structures with horizontal nanosheets forming channels and gate structures surrounding them.
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Summary in bullet points:
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* Motor control method for compensating for displacement of objects due to heat generation in motors.
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* Fabrication method for transistors with nanosheets surrounded by shell material to enhance charge carrier mobility.
 +
* Transistor structures with horizontal nanosheets forming channels and gate structures surrounding them.
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Notable applications:
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* Semiconductor manufacturing
 +
* Robotics
 +
* Automation
 +
* Integrated circuits
 +
* High-performance transistors
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* Advanced electronic devices
 +
* High-performance computing systems
 +
* Nanotechnology research
 +
* Consumer electronics manufacturing
 +
* Telecommunications sector
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==Patent applications for Tokyo Electron Limited on April 11th, 2024==
 
==Patent applications for Tokyo Electron Limited on April 11th, 2024==
  

Latest revision as of 11:03, 16 April 2024

Summary of the patent applications from Tokyo Electron Limited on April 11th, 2024

Tokyo Electron Limited has recently filed patents related to motor control methods for object transfer in substrate processing apparatus, fabrication of transistors with nanosheets surrounded by shell material, and transistor structures with horizontal nanosheets forming channels and gate structures surrounding them.

Summary in bullet points:

  • Motor control method for compensating for displacement of objects due to heat generation in motors.
  • Fabrication method for transistors with nanosheets surrounded by shell material to enhance charge carrier mobility.
  • Transistor structures with horizontal nanosheets forming channels and gate structures surrounding them.

Notable applications:

  • Semiconductor manufacturing
  • Robotics
  • Automation
  • Integrated circuits
  • High-performance transistors
  • Advanced electronic devices
  • High-performance computing systems
  • Nanotechnology research
  • Consumer electronics manufacturing
  • Telecommunications sector



Contents

Patent applications for Tokyo Electron Limited on April 11th, 2024

SUBSTRATE PROCESSING APPARATUS (18483050)

Main Inventor

Masato KADOBE


FILM FORMING APPARATUS AND FILM FORMING METHOD (18477060)

Main Inventor

Yasunobu SUZUKI


METHOD FOR SETTING UP TEST APPARATUS AND TEST APPARATUS (18264319)

Main Inventor

Shinjiro WATANABE


PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD (18392294)

Main Inventor

Chishio KOSHIMIZU


PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD (18274808)

Main Inventor

Masaharu SHIRATANI


System and Method for Plasma Process Uniformity Control (17961335)

Main Inventor

Sergey Voronin


PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS (18477047)

Main Inventor

Yusuke KIKUCHI


SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS (18263920)

Main Inventor

Makoto WADA


SUBSTRATE PROCESSING APPARATUS (18372995)

Main Inventor

Ryosuke GUNJI


PLASMA PROCESSING APPARATUS AND CLEANING METHOD (18544468)

Main Inventor

Kazuki TSUCHIYA


PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS (18389827)

Main Inventor

Hironari SASAGAWA


SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR A SUBSTRATE PROCESSING APPARATUS (17961601)

Main Inventor

Keisuke TSUGAO


SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMPUTER STORAGE MEDIUM (18473459)

Main Inventor

Shinichiro KAWAKAMI


APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM AND METHOD OF PROCESSING SUBSTRATE (18273446)

Main Inventor

Takehiro SHINDO


SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD (18376512)

Main Inventor

Isamu TAODA


SHIFTED MULTI-VIA CONNECTION FOR HYBRID BONDING (18373098)

Main Inventor

Kevin RYAN


3D NANOSHEET STACK WITH DUAL SELECTIVE CHANNEL REMOVAL OF HIGH MOBILITY CHANNELS (17962233)

Main Inventor

H. Jim Fulford


HIGH PERFORMANCE 3D CHANNELS WITH UPSILON NANOSHEETS (17962222)

Main Inventor

Mark I. Gardner


SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF (17962235)

Main Inventor

H. Jim Fulford


MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM (18480575)

Main Inventor

Youichi MASAKI

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