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Bibliographic details for Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
- Page name: Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 26 April 2024 02:32 UTC
- Date retrieved: 24 May 2024 08:02 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366
- Page Version ID: 55366
Citation styles for Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
APA style
Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract. (2024, April 26). WikiPatents, . Retrieved 08:02, May 24, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366.
MLA style
"Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract." WikiPatents, . 26 Apr 2024, 02:32 UTC. 24 May 2024, 08:02 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366>.
MHRA style
WikiPatents contributors, 'Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract', WikiPatents, , 26 April 2024, 02:32 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366> [accessed 24 May 2024]
Chicago style
WikiPatents contributors, "Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366 (accessed May 24, 2024).
CBE/CSE style
WikiPatents contributors. Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract [Internet]. WikiPatents, ; 2024 Apr 26, 02:32 UTC [cited 2024 May 24]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366.
Bluebook style
Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366 (last visited May 24, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366", note = "[Online; accessed 24-May-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "Samsung electronics co., ltd. (20240136234). METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240136234)._METHOD_OF_MEASURING_OVERLAY_OFFSET_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55366}", note = "[Online; accessed 24-May-2024]" }