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Bibliographic details for Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract

Citation styles for Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract

APA style

Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract. (2024, April 26). WikiPatents, . Retrieved 07:10, May 25, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240133683)._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55250.

MLA style

"Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract." WikiPatents, . 26 Apr 2024, 02:24 UTC. 25 May 2024, 07:10 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240133683)._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55250>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract', WikiPatents, , 26 April 2024, 02:24 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240133683)._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55250> [accessed 25 May 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240133683)._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55250 (accessed May 25, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract [Internet]. WikiPatents, ; 2024 Apr 26, 02:24 UTC [cited 2024 May 25]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240133683)._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55250.

Bluebook style

Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240133683)._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55250 (last visited May 25, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240133683)._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55250",
   note = "[Online; accessed 25-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240133683). OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240133683)._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract&oldid=55250}",
   note = "[Online; accessed 25-May-2024]"
 }


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