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Bibliographic details for Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract

Citation styles for Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract

APA style

Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract. (2024, April 20). WikiPatents, . Retrieved 16:33, May 25, 2024 from http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240130212)._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract&oldid=55070.

MLA style

"Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract." WikiPatents, . 20 Apr 2024, 17:01 UTC. 25 May 2024, 16:33 <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240130212)._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract&oldid=55070>.

MHRA style

WikiPatents contributors, 'Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract', WikiPatents, , 20 April 2024, 17:01 UTC, <http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240130212)._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract&oldid=55070> [accessed 25 May 2024]

Chicago style

WikiPatents contributors, "Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240130212)._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract&oldid=55070 (accessed May 25, 2024).

CBE/CSE style

WikiPatents contributors. Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract [Internet]. WikiPatents, ; 2024 Apr 20, 17:01 UTC [cited 2024 May 25]. Available from: http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240130212)._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract&oldid=55070.

Bluebook style

Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract, http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240130212)._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract&oldid=55070 (last visited May 25, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240130212)._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract&oldid=55070",
   note = "[Online; accessed 25-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "Samsung electronics co., ltd. (20240130212). METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING DOUBLE PATTERNING PROCESS simplified abstract --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=Samsung_electronics_co.,_ltd._(20240130212)._METHOD_OF_MANUFACTURING_SEMICONDUCTOR_DEVICE_INCLUDING_DOUBLE_PATTERNING_PROCESS_simplified_abstract&oldid=55070}",
   note = "[Online; accessed 25-May-2024]"
 }


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