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Bibliographic details for METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070)
- Page name: METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 15 October 2023 08:17 UTC
- Date retrieved: 17 May 2024 04:00 UTC
- Permanent URL: http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102
- Page Version ID: 1102
Citation styles for METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070)
APA style
METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070). (2023, October 15). WikiPatents, . Retrieved 04:00, May 17, 2024 from http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102.
MLA style
"METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070)." WikiPatents, . 15 Oct 2023, 08:17 UTC. 17 May 2024, 04:00 <http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102>.
MHRA style
WikiPatents contributors, 'METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070)', WikiPatents, , 15 October 2023, 08:17 UTC, <http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102> [accessed 17 May 2024]
Chicago style
WikiPatents contributors, "METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070)," WikiPatents, , http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102 (accessed May 17, 2024).
CBE/CSE style
WikiPatents contributors. METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070) [Internet]. WikiPatents, ; 2023 Oct 15, 08:17 UTC [cited 2024 May 17]. Available from: http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102.
Bluebook style
METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070), http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102 (last visited May 17, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070) --- WikiPatents{,} ", year = "2023", url = "http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102", note = "[Online; accessed 17-May-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "METHOD VERIFYING PROCESS PROXIMITY CORRECTION USING MACHINE LEARNING, AND SEMICONDUCTOR MANUFACTURING METHOD USING SAME: abstract simplified (17903070) --- WikiPatents{,} ", year = "2023", url = "\url{http://wikipatents.org/index.php?title=METHOD_VERIFYING_PROCESS_PROXIMITY_CORRECTION_USING_MACHINE_LEARNING,_AND_SEMICONDUCTOR_MANUFACTURING_METHOD_USING_SAME:_abstract_simplified_(17903070)&oldid=1102}", note = "[Online; accessed 17-May-2024]" }