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Bibliographic details for EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640)

Citation styles for EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640)

APA style

EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640). (2023, October 17). WikiPatents, . Retrieved 00:15, May 25, 2024 from http://wikipatents.org/index.php?title=EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF:_abstract_simplified_(18334640)&oldid=2117.

MLA style

"EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640)." WikiPatents, . 17 Oct 2023, 01:24 UTC. 25 May 2024, 00:15 <http://wikipatents.org/index.php?title=EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF:_abstract_simplified_(18334640)&oldid=2117>.

MHRA style

WikiPatents contributors, 'EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640)', WikiPatents, , 17 October 2023, 01:24 UTC, <http://wikipatents.org/index.php?title=EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF:_abstract_simplified_(18334640)&oldid=2117> [accessed 25 May 2024]

Chicago style

WikiPatents contributors, "EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640)," WikiPatents, , http://wikipatents.org/index.php?title=EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF:_abstract_simplified_(18334640)&oldid=2117 (accessed May 25, 2024).

CBE/CSE style

WikiPatents contributors. EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640) [Internet]. WikiPatents, ; 2023 Oct 17, 01:24 UTC [cited 2024 May 25]. Available from: http://wikipatents.org/index.php?title=EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF:_abstract_simplified_(18334640)&oldid=2117.

Bluebook style

EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640), http://wikipatents.org/index.php?title=EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF:_abstract_simplified_(18334640)&oldid=2117 (last visited May 25, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640) --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF:_abstract_simplified_(18334640)&oldid=2117",
   note = "[Online; accessed 25-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "EXTREME ULTRAVIOLET LITHOGRAPHY METHOD, EXTREME ULTRAVIOLET MASK AND FORMATION METHOD THEREOF: abstract simplified (18334640) --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=EXTREME_ULTRAVIOLET_LITHOGRAPHY_METHOD,_EXTREME_ULTRAVIOLET_MASK_AND_FORMATION_METHOD_THEREOF:_abstract_simplified_(18334640)&oldid=2117}",
   note = "[Online; accessed 25-May-2024]"
 }


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