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Bibliographic details for EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709)
- Page name: EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 October 2023 16:58 UTC
- Date retrieved: 12 May 2024 01:32 UTC
- Permanent URL: http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671
- Page Version ID: 1671
Citation styles for EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709)
APA style
EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709). (2023, October 16). WikiPatents, . Retrieved 01:32, May 12, 2024 from http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671.
MLA style
"EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709)." WikiPatents, . 16 Oct 2023, 16:58 UTC. 12 May 2024, 01:32 <http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671>.
MHRA style
WikiPatents contributors, 'EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709)', WikiPatents, , 16 October 2023, 16:58 UTC, <http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671> [accessed 12 May 2024]
Chicago style
WikiPatents contributors, "EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709)," WikiPatents, , http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671 (accessed May 12, 2024).
CBE/CSE style
WikiPatents contributors. EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709) [Internet]. WikiPatents, ; 2023 Oct 16, 16:58 UTC [cited 2024 May 12]. Available from: http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671.
Bluebook style
EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709), http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671 (last visited May 12, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709) --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671",
note = "[Online; accessed 12-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTAMINATION: abstract simplified (17717709) --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=EUV_LITHOGRAPHY_APPARATUS_AND_OPERATING_METHOD_FOR_MITIGATING_CONTAMINATION:_abstract_simplified_(17717709)&oldid=1671}",
note = "[Online; accessed 12-May-2024]"
}
