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Bibliographic details for Chemical Mechanical Planarization Tool: abstract simplified (18334526)
- Page name: Chemical Mechanical Planarization Tool: abstract simplified (18334526)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 October 2023 17:33 UTC
- Date retrieved: 16 May 2024 09:46 UTC
- Permanent URL: http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074
- Page Version ID: 2074
Citation styles for Chemical Mechanical Planarization Tool: abstract simplified (18334526)
APA style
Chemical Mechanical Planarization Tool: abstract simplified (18334526). (2023, October 16). WikiPatents, . Retrieved 09:46, May 16, 2024 from http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074.
MLA style
"Chemical Mechanical Planarization Tool: abstract simplified (18334526)." WikiPatents, . 16 Oct 2023, 17:33 UTC. 16 May 2024, 09:46 <http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074>.
MHRA style
WikiPatents contributors, 'Chemical Mechanical Planarization Tool: abstract simplified (18334526)', WikiPatents, , 16 October 2023, 17:33 UTC, <http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074> [accessed 16 May 2024]
Chicago style
WikiPatents contributors, "Chemical Mechanical Planarization Tool: abstract simplified (18334526)," WikiPatents, , http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074 (accessed May 16, 2024).
CBE/CSE style
WikiPatents contributors. Chemical Mechanical Planarization Tool: abstract simplified (18334526) [Internet]. WikiPatents, ; 2023 Oct 16, 17:33 UTC [cited 2024 May 16]. Available from: http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074.
Bluebook style
Chemical Mechanical Planarization Tool: abstract simplified (18334526), http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074 (last visited May 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Chemical Mechanical Planarization Tool: abstract simplified (18334526) --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074",
note = "[Online; accessed 16-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "Chemical Mechanical Planarization Tool: abstract simplified (18334526) --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=Chemical_Mechanical_Planarization_Tool:_abstract_simplified_(18334526)&oldid=2074}",
note = "[Online; accessed 16-May-2024]"
}
