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Bibliographic details for 20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.)

Citation styles for 20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.)

APA style

20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.). (2024, March 20). WikiPatents, . Retrieved 13:36, June 3, 2024 from http://wikipatents.org/index.php?title=20240082881.SUBSTRATE_CLEANING_DEVICE_AND_SUBSTRATE_CLEANING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39517.

MLA style

"20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.)." WikiPatents, . 20 Mar 2024, 02:00 UTC. 3 Jun 2024, 13:36 <http://wikipatents.org/index.php?title=20240082881.SUBSTRATE_CLEANING_DEVICE_AND_SUBSTRATE_CLEANING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39517>.

MHRA style

WikiPatents contributors, '20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.)', WikiPatents, , 20 March 2024, 02:00 UTC, <http://wikipatents.org/index.php?title=20240082881.SUBSTRATE_CLEANING_DEVICE_AND_SUBSTRATE_CLEANING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39517> [accessed 3 June 2024]

Chicago style

WikiPatents contributors, "20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=20240082881.SUBSTRATE_CLEANING_DEVICE_AND_SUBSTRATE_CLEANING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39517 (accessed June 3, 2024).

CBE/CSE style

WikiPatents contributors. 20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.) [Internet]. WikiPatents, ; 2024 Mar 20, 02:00 UTC [cited 2024 Jun 3]. Available from: http://wikipatents.org/index.php?title=20240082881.SUBSTRATE_CLEANING_DEVICE_AND_SUBSTRATE_CLEANING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39517.

Bluebook style

20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.), http://wikipatents.org/index.php?title=20240082881.SUBSTRATE_CLEANING_DEVICE_AND_SUBSTRATE_CLEANING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39517 (last visited June 3, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=20240082881.SUBSTRATE_CLEANING_DEVICE_AND_SUBSTRATE_CLEANING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39517",
   note = "[Online; accessed 3-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "20240082881.SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD simplified abstract (samsung electronics co., ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=20240082881.SUBSTRATE_CLEANING_DEVICE_AND_SUBSTRATE_CLEANING_METHOD_simplified_abstract_(samsung_electronics_co.,_ltd.)&oldid=39517}",
   note = "[Online; accessed 3-June-2024]"
 }


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