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Bibliographic details for 18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.)

Citation styles for 18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.)

APA style

18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.). (2024, April 16). WikiPatents, . Retrieved 05:56, May 16, 2024 from http://wikipatents.org/index.php?title=18542093._SWITCHING_CONTROL_ALGORITHMS_ON_DETECTION_OF_EXPOSURE_OF_UNDERLYING_LAYER_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54288.

MLA style

"18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.)." WikiPatents, . 16 Apr 2024, 04:10 UTC. 16 May 2024, 05:56 <http://wikipatents.org/index.php?title=18542093._SWITCHING_CONTROL_ALGORITHMS_ON_DETECTION_OF_EXPOSURE_OF_UNDERLYING_LAYER_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54288>.

MHRA style

WikiPatents contributors, '18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.)', WikiPatents, , 16 April 2024, 04:10 UTC, <http://wikipatents.org/index.php?title=18542093._SWITCHING_CONTROL_ALGORITHMS_ON_DETECTION_OF_EXPOSURE_OF_UNDERLYING_LAYER_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54288> [accessed 16 May 2024]

Chicago style

WikiPatents contributors, "18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=18542093._SWITCHING_CONTROL_ALGORITHMS_ON_DETECTION_OF_EXPOSURE_OF_UNDERLYING_LAYER_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54288 (accessed May 16, 2024).

CBE/CSE style

WikiPatents contributors. 18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Apr 16, 04:10 UTC [cited 2024 May 16]. Available from: http://wikipatents.org/index.php?title=18542093._SWITCHING_CONTROL_ALGORITHMS_ON_DETECTION_OF_EXPOSURE_OF_UNDERLYING_LAYER_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54288.

Bluebook style

18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=18542093._SWITCHING_CONTROL_ALGORITHMS_ON_DETECTION_OF_EXPOSURE_OF_UNDERLYING_LAYER_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54288 (last visited May 16, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18542093._SWITCHING_CONTROL_ALGORITHMS_ON_DETECTION_OF_EXPOSURE_OF_UNDERLYING_LAYER_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54288",
   note = "[Online; accessed 16-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18542093. SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING LAYER DURING POLISHING simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18542093._SWITCHING_CONTROL_ALGORITHMS_ON_DETECTION_OF_EXPOSURE_OF_UNDERLYING_LAYER_DURING_POLISHING_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54288}",
   note = "[Online; accessed 16-May-2024]"
 }


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