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Bibliographic details for 18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED)
- Page name: 18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 05:17 UTC
- Date retrieved: 18 May 2024 09:06 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941
- Page Version ID: 43941
Citation styles for 18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED)
APA style
18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED). (2024, March 25). WikiPatents, . Retrieved 09:06, May 18, 2024 from http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941.
MLA style
"18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED)." WikiPatents, . 25 Mar 2024, 05:17 UTC. 18 May 2024, 09:06 <http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941>.
MHRA style
WikiPatents contributors, '18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED)', WikiPatents, , 25 March 2024, 05:17 UTC, <http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941> [accessed 18 May 2024]
Chicago style
WikiPatents contributors, "18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED)," WikiPatents, , http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941 (accessed May 18, 2024).
CBE/CSE style
WikiPatents contributors. 18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED) [Internet]. WikiPatents, ; 2024 Mar 25, 05:17 UTC [cited 2024 May 18]. Available from: http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941.
Bluebook style
18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED), http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941 (last visited May 18, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941",
note = "[Online; accessed 18-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18468928. ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD simplified abstract (TOKYO ELECTRON LIMITED) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=18468928._ETCHING_CONTROL_SYSTEM_AND_ETCHING_CONTROL_METHOD_simplified_abstract_(TOKYO_ELECTRON_LIMITED)&oldid=43941}",
note = "[Online; accessed 18-May-2024]"
}
