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Bibliographic details for 18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, April 26). WikiPatents, . Retrieved 03:34, May 27, 2024 from http://wikipatents.org/index.php?title=18460929._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=57371.

MLA style

"18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 26 Apr 2024, 05:03 UTC. 27 May 2024, 03:34 <http://wikipatents.org/index.php?title=18460929._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=57371>.

MHRA style

WikiPatents contributors, '18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 26 April 2024, 05:03 UTC, <http://wikipatents.org/index.php?title=18460929._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=57371> [accessed 27 May 2024]

Chicago style

WikiPatents contributors, "18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18460929._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=57371 (accessed May 27, 2024).

CBE/CSE style

WikiPatents contributors. 18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Apr 26, 05:03 UTC [cited 2024 May 27]. Available from: http://wikipatents.org/index.php?title=18460929._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=57371.

Bluebook style

18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18460929._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=57371 (last visited May 27, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18460929._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=57371",
   note = "[Online; accessed 27-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18460929. OVERLAY MEASURING METHOD AND SYSTEM, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18460929._OVERLAY_MEASURING_METHOD_AND_SYSTEM,_AND_METHOD_OF_MANUFACTURING_A_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=57371}",
   note = "[Online; accessed 27-May-2024]"
 }


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