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Bibliographic details for 18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.). (2024, April 26). WikiPatents, . Retrieved 06:26, May 19, 2024 from http://wikipatents.org/index.php?title=18320387._EXTREME_ULTRAVIOLET_(EUV)_MASK_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56984.

MLA style

"18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 26 Apr 2024, 04:22 UTC. 19 May 2024, 06:26 <http://wikipatents.org/index.php?title=18320387._EXTREME_ULTRAVIOLET_(EUV)_MASK_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56984>.

MHRA style

WikiPatents contributors, '18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 26 April 2024, 04:22 UTC, <http://wikipatents.org/index.php?title=18320387._EXTREME_ULTRAVIOLET_(EUV)_MASK_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56984> [accessed 19 May 2024]

Chicago style

WikiPatents contributors, "18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18320387._EXTREME_ULTRAVIOLET_(EUV)_MASK_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56984 (accessed May 19, 2024).

CBE/CSE style

WikiPatents contributors. 18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Apr 26, 04:22 UTC [cited 2024 May 19]. Available from: http://wikipatents.org/index.php?title=18320387._EXTREME_ULTRAVIOLET_(EUV)_MASK_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56984.

Bluebook style

18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18320387._EXTREME_ULTRAVIOLET_(EUV)_MASK_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56984 (last visited May 19, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18320387._EXTREME_ULTRAVIOLET_(EUV)_MASK_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56984",
   note = "[Online; accessed 19-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18320387. EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18320387._EXTREME_ULTRAVIOLET_(EUV)_MASK_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=56984}",
   note = "[Online; accessed 19-May-2024]"
 }


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