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Citation styles for 18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, April 12). WikiPatents, . Retrieved 10:22, May 17, 2024 from http://wikipatents.org/index.php?title=18159631._SPACER_FORMATION_METHOD_FOR_MULTI-GATE_DEVICE_AND_STRUCTURES_THEREOF_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=51020.

MLA style

"18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 12 Apr 2024, 08:58 UTC. 17 May 2024, 10:22 <http://wikipatents.org/index.php?title=18159631._SPACER_FORMATION_METHOD_FOR_MULTI-GATE_DEVICE_AND_STRUCTURES_THEREOF_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=51020>.

MHRA style

WikiPatents contributors, '18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 12 April 2024, 08:58 UTC, <http://wikipatents.org/index.php?title=18159631._SPACER_FORMATION_METHOD_FOR_MULTI-GATE_DEVICE_AND_STRUCTURES_THEREOF_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=51020> [accessed 17 May 2024]

Chicago style

WikiPatents contributors, "18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18159631._SPACER_FORMATION_METHOD_FOR_MULTI-GATE_DEVICE_AND_STRUCTURES_THEREOF_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=51020 (accessed May 17, 2024).

CBE/CSE style

WikiPatents contributors. 18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Apr 12, 08:58 UTC [cited 2024 May 17]. Available from: http://wikipatents.org/index.php?title=18159631._SPACER_FORMATION_METHOD_FOR_MULTI-GATE_DEVICE_AND_STRUCTURES_THEREOF_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=51020.

Bluebook style

18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=18159631._SPACER_FORMATION_METHOD_FOR_MULTI-GATE_DEVICE_AND_STRUCTURES_THEREOF_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=51020 (last visited May 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18159631._SPACER_FORMATION_METHOD_FOR_MULTI-GATE_DEVICE_AND_STRUCTURES_THEREOF_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=51020",
   note = "[Online; accessed 17-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18159631. SPACER FORMATION METHOD FOR MULTI-GATE DEVICE AND STRUCTURES THEREOF simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18159631._SPACER_FORMATION_METHOD_FOR_MULTI-GATE_DEVICE_AND_STRUCTURES_THEREOF_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=51020}",
   note = "[Online; accessed 17-May-2024]"
 }