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Bibliographic details for 17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.)
- Page name: 17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 04:11 UTC
- Date retrieved: 16 May 2024 21:10 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307
- Page Version ID: 54307
Citation styles for 17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.)
APA style
17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.). (2024, April 16). WikiPatents, . Retrieved 21:10, May 16, 2024 from http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307.
MLA style
"17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.)." WikiPatents, . 16 Apr 2024, 04:11 UTC. 16 May 2024, 21:10 <http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307>.
MHRA style
WikiPatents contributors, '17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.)', WikiPatents, , 16 April 2024, 04:11 UTC, <http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307> [accessed 16 May 2024]
Chicago style
WikiPatents contributors, "17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307 (accessed May 16, 2024).
CBE/CSE style
WikiPatents contributors. 17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Apr 16, 04:11 UTC [cited 2024 May 16]. Available from: http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307.
Bluebook style
17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307 (last visited May 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307",
note = "[Online; accessed 16-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17963687. ISOTROPIC SILICON NITRIDE REMOVAL simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17963687._ISOTROPIC_SILICON_NITRIDE_REMOVAL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54307}",
note = "[Online; accessed 16-May-2024]"
}
