Cite This Page
Bibliographic details for 17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.)
- Page name: 17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 16 April 2024 04:11 UTC
- Date retrieved: 16 May 2024 23:05 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312
- Page Version ID: 54312
Citation styles for 17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.)
APA style
17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.). (2024, April 16). WikiPatents, . Retrieved 23:05, May 16, 2024 from http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312.
MLA style
"17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.)." WikiPatents, . 16 Apr 2024, 04:11 UTC. 16 May 2024, 23:05 <http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312>.
MHRA style
WikiPatents contributors, '17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.)', WikiPatents, , 16 April 2024, 04:11 UTC, <http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312> [accessed 16 May 2024]
Chicago style
WikiPatents contributors, "17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312 (accessed May 16, 2024).
CBE/CSE style
WikiPatents contributors. 17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Apr 16, 04:11 UTC [cited 2024 May 16]. Available from: http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312.
Bluebook style
17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312 (last visited May 16, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312",
note = "[Online; accessed 16-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17962410. BIPOLAR ELECTROSTATIC CHUCK FOR ETCH CHAMBER simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17962410._BIPOLAR_ELECTROSTATIC_CHUCK_FOR_ETCH_CHAMBER_simplified_abstract_(Applied_Materials,_Inc.)&oldid=54312}",
note = "[Online; accessed 16-May-2024]"
}
