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Bibliographic details for 17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.)

APA style

17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 2). WikiPatents, . Retrieved 10:34, May 18, 2024 from http://wikipatents.org/index.php?title=17956919._METHOD_OF_FORMING_A_PATTERN_OF_SEMICONDUCTOR_DEVICE_OF_A_SEMICONDUCTOR_DEVICE_ON_A_SEMICONDUCTOR_SUBSTRATE_BY_USING_AN_EXTREME_ULTRAVIOLET_MASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21337.

MLA style

"17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 2 Jan 2024, 17:56 UTC. 18 May 2024, 10:34 <http://wikipatents.org/index.php?title=17956919._METHOD_OF_FORMING_A_PATTERN_OF_SEMICONDUCTOR_DEVICE_OF_A_SEMICONDUCTOR_DEVICE_ON_A_SEMICONDUCTOR_SUBSTRATE_BY_USING_AN_EXTREME_ULTRAVIOLET_MASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21337>.

MHRA style

WikiPatents contributors, '17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 2 January 2024, 17:56 UTC, <http://wikipatents.org/index.php?title=17956919._METHOD_OF_FORMING_A_PATTERN_OF_SEMICONDUCTOR_DEVICE_OF_A_SEMICONDUCTOR_DEVICE_ON_A_SEMICONDUCTOR_SUBSTRATE_BY_USING_AN_EXTREME_ULTRAVIOLET_MASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21337> [accessed 18 May 2024]

Chicago style

WikiPatents contributors, "17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17956919._METHOD_OF_FORMING_A_PATTERN_OF_SEMICONDUCTOR_DEVICE_OF_A_SEMICONDUCTOR_DEVICE_ON_A_SEMICONDUCTOR_SUBSTRATE_BY_USING_AN_EXTREME_ULTRAVIOLET_MASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21337 (accessed May 18, 2024).

CBE/CSE style

WikiPatents contributors. 17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 2, 17:56 UTC [cited 2024 May 18]. Available from: http://wikipatents.org/index.php?title=17956919._METHOD_OF_FORMING_A_PATTERN_OF_SEMICONDUCTOR_DEVICE_OF_A_SEMICONDUCTOR_DEVICE_ON_A_SEMICONDUCTOR_SUBSTRATE_BY_USING_AN_EXTREME_ULTRAVIOLET_MASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21337.

Bluebook style

17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17956919._METHOD_OF_FORMING_A_PATTERN_OF_SEMICONDUCTOR_DEVICE_OF_A_SEMICONDUCTOR_DEVICE_ON_A_SEMICONDUCTOR_SUBSTRATE_BY_USING_AN_EXTREME_ULTRAVIOLET_MASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21337 (last visited May 18, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17956919._METHOD_OF_FORMING_A_PATTERN_OF_SEMICONDUCTOR_DEVICE_OF_A_SEMICONDUCTOR_DEVICE_ON_A_SEMICONDUCTOR_SUBSTRATE_BY_USING_AN_EXTREME_ULTRAVIOLET_MASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21337",
   note = "[Online; accessed 18-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17956919. METHOD OF FORMING A PATTERN OF SEMICONDUCTOR DEVICE OF A SEMICONDUCTOR DEVICE ON A SEMICONDUCTOR SUBSTRATE BY USING AN EXTREME ULTRAVIOLET MASK simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17956919._METHOD_OF_FORMING_A_PATTERN_OF_SEMICONDUCTOR_DEVICE_OF_A_SEMICONDUCTOR_DEVICE_ON_A_SEMICONDUCTOR_SUBSTRATE_BY_USING_AN_EXTREME_ULTRAVIOLET_MASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=21337}",
   note = "[Online; accessed 18-May-2024]"
 }


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