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Bibliographic details for 17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Page name: 17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 06:03 UTC
- Date retrieved: 2 June 2024 20:26 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446
- Page Version ID: 25446
Citation styles for 17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
APA style
17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 4). WikiPatents, . Retrieved 20:26, June 2, 2024 from http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446.
MLA style
"17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 4 Jan 2024, 06:03 UTC. 2 Jun 2024, 20:26 <http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446>.
MHRA style
WikiPatents contributors, '17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 4 January 2024, 06:03 UTC, <http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446> [accessed 2 June 2024]
Chicago style
WikiPatents contributors, "17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446 (accessed June 2, 2024).
CBE/CSE style
WikiPatents contributors. 17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 4, 06:03 UTC [cited 2024 Jun 2]. Available from: http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446.
Bluebook style
17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446 (last visited June 2, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446", note = "[Online; accessed 2-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17870340. WAFER POLISHING APPARATUS AND METHOD OF DETECTING DEFECT OF RETAINER RING INCLUDED IN THE WAFER POLISHING APPARATUS simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17870340._WAFER_POLISHING_APPARATUS_AND_METHOD_OF_DETECTING_DEFECT_OF_RETAINER_RING_INCLUDED_IN_THE_WAFER_POLISHING_APPARATUS_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25446}", note = "[Online; accessed 2-June-2024]" }