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Bibliographic details for 17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.)

Citation styles for 17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.)

APA style

17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.). (2024, January 1). WikiPatents, . Retrieved 17:53, May 19, 2024 from http://wikipatents.org/index.php?title=17839809._METHOD_OF_FORMING_CARBON-BASED_SPACER_FOR_EUV_PHOTORESIST_PATTERNS_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18972.

MLA style

"17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.)." WikiPatents, . 1 Jan 2024, 18:40 UTC. 19 May 2024, 17:53 <http://wikipatents.org/index.php?title=17839809._METHOD_OF_FORMING_CARBON-BASED_SPACER_FOR_EUV_PHOTORESIST_PATTERNS_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18972>.

MHRA style

WikiPatents contributors, '17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.)', WikiPatents, , 1 January 2024, 18:40 UTC, <http://wikipatents.org/index.php?title=17839809._METHOD_OF_FORMING_CARBON-BASED_SPACER_FOR_EUV_PHOTORESIST_PATTERNS_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18972> [accessed 19 May 2024]

Chicago style

WikiPatents contributors, "17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=17839809._METHOD_OF_FORMING_CARBON-BASED_SPACER_FOR_EUV_PHOTORESIST_PATTERNS_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18972 (accessed May 19, 2024).

CBE/CSE style

WikiPatents contributors. 17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jan 1, 18:40 UTC [cited 2024 May 19]. Available from: http://wikipatents.org/index.php?title=17839809._METHOD_OF_FORMING_CARBON-BASED_SPACER_FOR_EUV_PHOTORESIST_PATTERNS_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18972.

Bluebook style

17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=17839809._METHOD_OF_FORMING_CARBON-BASED_SPACER_FOR_EUV_PHOTORESIST_PATTERNS_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18972 (last visited May 19, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17839809._METHOD_OF_FORMING_CARBON-BASED_SPACER_FOR_EUV_PHOTORESIST_PATTERNS_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18972",
   note = "[Online; accessed 19-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17839809. METHOD OF FORMING CARBON-BASED SPACER FOR EUV PHOTORESIST PATTERNS simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17839809._METHOD_OF_FORMING_CARBON-BASED_SPACER_FOR_EUV_PHOTORESIST_PATTERNS_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18972}",
   note = "[Online; accessed 19-May-2024]"
 }


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