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Bibliographic details for 17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 2). WikiPatents, . Retrieved 22:01, May 14, 2024 from http://wikipatents.org/index.php?title=17730993._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_CHIP_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20943.

MLA style

"17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 2 Jan 2024, 06:33 UTC. 14 May 2024, 22:01 <http://wikipatents.org/index.php?title=17730993._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_CHIP_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20943>.

MHRA style

WikiPatents contributors, '17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 2 January 2024, 06:33 UTC, <http://wikipatents.org/index.php?title=17730993._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_CHIP_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20943> [accessed 14 May 2024]

Chicago style

WikiPatents contributors, "17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17730993._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_CHIP_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20943 (accessed May 14, 2024).

CBE/CSE style

WikiPatents contributors. 17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 2, 06:33 UTC [cited 2024 May 14]. Available from: http://wikipatents.org/index.php?title=17730993._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_CHIP_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20943.

Bluebook style

17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17730993._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_CHIP_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20943 (last visited May 14, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17730993._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_CHIP_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20943",
   note = "[Online; accessed 14-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17730993. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR CHIP USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17730993._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MANUFACTURING_SEMICONDUCTOR_CHIP_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20943}",
   note = "[Online; accessed 14-May-2024]"
 }


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