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Bibliographic details for 17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Page name: 17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 01:01 UTC
- Date retrieved: 13 May 2024 15:20 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065
- Page Version ID: 19065
Citation styles for 17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
APA style
17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 2). WikiPatents, . Retrieved 15:20, May 13, 2024 from http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065.
MLA style
"17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 2 Jan 2024, 01:01 UTC. 13 May 2024, 15:20 <http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065>.
MHRA style
WikiPatents contributors, '17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 2 January 2024, 01:01 UTC, <http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065> [accessed 13 May 2024]
Chicago style
WikiPatents contributors, "17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065 (accessed May 13, 2024).
CBE/CSE style
WikiPatents contributors. 17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 01:01 UTC [cited 2024 May 13]. Available from: http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065.
Bluebook style
17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065 (last visited May 13, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065",
note = "[Online; accessed 13-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17714363. SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR PROCESSING METHOD USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17714363._SEMICONDUCTOR_PROCESSING_APPARATUS_AND_SEMICONDUCTOR_PROCESSING_METHOD_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19065}",
note = "[Online; accessed 13-May-2024]"
}
