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Bibliographic details for 17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 04:37 UTC
- Date retrieved: 10 May 2024 00:09 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276
- Page Version ID: 20276
Citation styles for 17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
APA style
17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2024, January 2). WikiPatents, . Retrieved 00:09, May 10, 2024 from http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276.
MLA style
"17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 2 Jan 2024, 04:37 UTC. 10 May 2024, 00:09 <http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276>.
MHRA style
WikiPatents contributors, '17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 2 January 2024, 04:37 UTC, <http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276> [accessed 10 May 2024]
Chicago style
WikiPatents contributors, "17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276 (accessed May 10, 2024).
CBE/CSE style
WikiPatents contributors. 17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 2, 04:37 UTC [cited 2024 May 10]. Available from: http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276.
Bluebook style
17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276 (last visited May 10, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276", note = "[Online; accessed 10-May-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17671021. OPTICAL PROXIMITY CORRECTION METHOD USING CHIEF RAY ANGLE AND PHOTOLITHOGRAPHY METHOD INCLUDING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17671021._OPTICAL_PROXIMITY_CORRECTION_METHOD_USING_CHIEF_RAY_ANGLE_AND_PHOTOLITHOGRAPHY_METHOD_INCLUDING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=20276}", note = "[Online; accessed 10-May-2024]" }