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Bibliographic details for 17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation)
- Page name: 17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 25 March 2024 08:09 UTC
- Date retrieved: 10 May 2024 20:02 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799
- Page Version ID: 44799
Citation styles for 17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation)
APA style
17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation). (2024, March 25). WikiPatents, . Retrieved 20:02, May 10, 2024 from http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799.
MLA style
"17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation)." WikiPatents, . 25 Mar 2024, 08:09 UTC. 10 May 2024, 20:02 <http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799>.
MHRA style
WikiPatents contributors, '17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation)', WikiPatents, , 25 March 2024, 08:09 UTC, <http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799> [accessed 10 May 2024]
Chicago style
WikiPatents contributors, "17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799 (accessed May 10, 2024).
CBE/CSE style
WikiPatents contributors. 17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation) [Internet]. WikiPatents, ; 2024 Mar 25, 08:09 UTC [cited 2024 May 10]. Available from: http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799.
Bluebook style
17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation), http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799 (last visited May 10, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799", note = "[Online; accessed 10-May-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17641538. PLASMA PROCESSING DEVICE simplified abstract (Hitachi High-Tech Corporation) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17641538._PLASMA_PROCESSING_DEVICE_simplified_abstract_(Hitachi_High-Tech_Corporation)&oldid=44799}", note = "[Online; accessed 10-May-2024]" }