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Bibliographic details for 17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

Citation styles for 17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 12:39, May 12, 2024 from http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303.

MLA style

"17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 04:52 UTC. 12 May 2024, 12:39 <http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303>.

MHRA style

WikiPatents contributors, '17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 04:52 UTC, <http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303> [accessed 12 May 2024]

Chicago style

WikiPatents contributors, "17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303 (accessed May 12, 2024).

CBE/CSE style

WikiPatents contributors. 17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 04:52 UTC [cited 2024 May 12]. Available from: http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303.

Bluebook style

17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303 (last visited May 12, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303",
   note = "[Online; accessed 12-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17463328. SYSTEM AND METHOD OF DISCHARGING AN EUV MASK simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17463328._SYSTEM_AND_METHOD_OF_DISCHARGING_AN_EUV_MASK_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20303}",
   note = "[Online; accessed 12-May-2024]"
 }


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