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Bibliographic details for 17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

Citation styles for 17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 16:10, May 11, 2024 from http://wikipatents.org/index.php?title=17462695._NEW_DESIGN_OF_EUV_VESSEL_PERIMETER_FLOW_AUTO_ADJUSTMENT_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20327.

MLA style

"17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 04:59 UTC. 11 May 2024, 16:10 <http://wikipatents.org/index.php?title=17462695._NEW_DESIGN_OF_EUV_VESSEL_PERIMETER_FLOW_AUTO_ADJUSTMENT_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20327>.

MHRA style

WikiPatents contributors, '17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 04:59 UTC, <http://wikipatents.org/index.php?title=17462695._NEW_DESIGN_OF_EUV_VESSEL_PERIMETER_FLOW_AUTO_ADJUSTMENT_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20327> [accessed 11 May 2024]

Chicago style

WikiPatents contributors, "17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17462695._NEW_DESIGN_OF_EUV_VESSEL_PERIMETER_FLOW_AUTO_ADJUSTMENT_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20327 (accessed May 11, 2024).

CBE/CSE style

WikiPatents contributors. 17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 04:59 UTC [cited 2024 May 11]. Available from: http://wikipatents.org/index.php?title=17462695._NEW_DESIGN_OF_EUV_VESSEL_PERIMETER_FLOW_AUTO_ADJUSTMENT_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20327.

Bluebook style

17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17462695._NEW_DESIGN_OF_EUV_VESSEL_PERIMETER_FLOW_AUTO_ADJUSTMENT_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20327 (last visited May 11, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17462695._NEW_DESIGN_OF_EUV_VESSEL_PERIMETER_FLOW_AUTO_ADJUSTMENT_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20327",
   note = "[Online; accessed 11-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17462695. NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17462695._NEW_DESIGN_OF_EUV_VESSEL_PERIMETER_FLOW_AUTO_ADJUSTMENT_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20327}",
   note = "[Online; accessed 11-May-2024]"
 }


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