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Bibliographic details for 17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Page name: 17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 04:52 UTC
- Date retrieved: 20 May 2024 12:47 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304
- Page Version ID: 20304
Citation styles for 17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
APA style
17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 12:47, May 20, 2024 from http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304.
MLA style
"17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 04:52 UTC. 20 May 2024, 12:47 <http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304>.
MHRA style
WikiPatents contributors, '17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 04:52 UTC, <http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304> [accessed 20 May 2024]
Chicago style
WikiPatents contributors, "17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304 (accessed May 20, 2024).
CBE/CSE style
WikiPatents contributors. 17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 04:52 UTC [cited 2024 May 20]. Available from: http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304.
Bluebook style
17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304 (last visited May 20, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304", note = "[Online; accessed 20-May-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304}", note = "[Online; accessed 20-May-2024]" }