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Citation styles for 17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 23:55, May 9, 2024 from http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304.

MLA style

"17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 04:52 UTC. 9 May 2024, 23:55 <http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304>.

MHRA style

WikiPatents contributors, '17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 04:52 UTC, <http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304> [accessed 9 May 2024]

Chicago style

WikiPatents contributors, "17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304 (accessed May 9, 2024).

CBE/CSE style

WikiPatents contributors. 17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 04:52 UTC [cited 2024 May 9]. Available from: http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304.

Bluebook style

17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304 (last visited May 9, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304",
   note = "[Online; accessed 9-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17460108. APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17460108._APPARATUS_AND_METHOD_FOR_GENERATING_EXTREME_ULTRAVIOLET_RADIATION_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20304}",
   note = "[Online; accessed 9-May-2024]"
 }