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Bibliographic details for 17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation)

Citation styles for 17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation)

APA style

17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation). (2024, January 4). WikiPatents, . Retrieved 07:49, May 17, 2024 from http://wikipatents.org/index.php?title=17456402._APPLYING_INERT_ION_BEAM_ETCHING_FOR_IMPROVING_A_PROFILE_AND_REPAIRING_SIDEWALL_DAMAGE_FOR_PHASE_CHANGE_MEMORY_DEVICES_simplified_abstract_(International_Business_Machines_Corporation)&oldid=25167.

MLA style

"17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation)." WikiPatents, . 4 Jan 2024, 05:27 UTC. 17 May 2024, 07:49 <http://wikipatents.org/index.php?title=17456402._APPLYING_INERT_ION_BEAM_ETCHING_FOR_IMPROVING_A_PROFILE_AND_REPAIRING_SIDEWALL_DAMAGE_FOR_PHASE_CHANGE_MEMORY_DEVICES_simplified_abstract_(International_Business_Machines_Corporation)&oldid=25167>.

MHRA style

WikiPatents contributors, '17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation)', WikiPatents, , 4 January 2024, 05:27 UTC, <http://wikipatents.org/index.php?title=17456402._APPLYING_INERT_ION_BEAM_ETCHING_FOR_IMPROVING_A_PROFILE_AND_REPAIRING_SIDEWALL_DAMAGE_FOR_PHASE_CHANGE_MEMORY_DEVICES_simplified_abstract_(International_Business_Machines_Corporation)&oldid=25167> [accessed 17 May 2024]

Chicago style

WikiPatents contributors, "17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation)," WikiPatents, , http://wikipatents.org/index.php?title=17456402._APPLYING_INERT_ION_BEAM_ETCHING_FOR_IMPROVING_A_PROFILE_AND_REPAIRING_SIDEWALL_DAMAGE_FOR_PHASE_CHANGE_MEMORY_DEVICES_simplified_abstract_(International_Business_Machines_Corporation)&oldid=25167 (accessed May 17, 2024).

CBE/CSE style

WikiPatents contributors. 17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation) [Internet]. WikiPatents, ; 2024 Jan 4, 05:27 UTC [cited 2024 May 17]. Available from: http://wikipatents.org/index.php?title=17456402._APPLYING_INERT_ION_BEAM_ETCHING_FOR_IMPROVING_A_PROFILE_AND_REPAIRING_SIDEWALL_DAMAGE_FOR_PHASE_CHANGE_MEMORY_DEVICES_simplified_abstract_(International_Business_Machines_Corporation)&oldid=25167.

Bluebook style

17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation), http://wikipatents.org/index.php?title=17456402._APPLYING_INERT_ION_BEAM_ETCHING_FOR_IMPROVING_A_PROFILE_AND_REPAIRING_SIDEWALL_DAMAGE_FOR_PHASE_CHANGE_MEMORY_DEVICES_simplified_abstract_(International_Business_Machines_Corporation)&oldid=25167 (last visited May 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17456402._APPLYING_INERT_ION_BEAM_ETCHING_FOR_IMPROVING_A_PROFILE_AND_REPAIRING_SIDEWALL_DAMAGE_FOR_PHASE_CHANGE_MEMORY_DEVICES_simplified_abstract_(International_Business_Machines_Corporation)&oldid=25167",
   note = "[Online; accessed 17-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17456402. APPLYING INERT ION BEAM ETCHING FOR IMPROVING A PROFILE AND REPAIRING SIDEWALL DAMAGE FOR PHASE CHANGE MEMORY DEVICES simplified abstract (International Business Machines Corporation) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17456402._APPLYING_INERT_ION_BEAM_ETCHING_FOR_IMPROVING_A_PROFILE_AND_REPAIRING_SIDEWALL_DAMAGE_FOR_PHASE_CHANGE_MEMORY_DEVICES_simplified_abstract_(International_Business_Machines_Corporation)&oldid=25167}",
   note = "[Online; accessed 17-May-2024]"
 }


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