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Citation styles for 17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 15:11, May 17, 2024 from http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509.

MLA style

"17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 02:56 UTC. 17 May 2024, 15:11 <http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509>.

MHRA style

WikiPatents contributors, '17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 02:56 UTC, <http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509> [accessed 17 May 2024]

Chicago style

WikiPatents contributors, "17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509 (accessed May 17, 2024).

CBE/CSE style

WikiPatents contributors. 17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 02:56 UTC [cited 2024 May 17]. Available from: http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509.

Bluebook style

17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509 (last visited May 17, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509",
   note = "[Online; accessed 17-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509}",
   note = "[Online; accessed 17-May-2024]"
 }