Samsung electronics co., ltd. (20240128892). POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract
Contents
- 1 POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
Organization Name
Inventor(s)
POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 20240128892 titled 'POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
Simplified Explanation
The power generator described in the patent application includes a resonance module circuit and a pulse module circuit. The resonance module circuit generates a first output voltage by selectively turning on and off a plurality of resonance control switches based on resonance control signals. The pulse module circuit generates a second output voltage by selectively turning on and off a plurality of pulse control switches based on pulse control signals. The power generator generates bias power based on the resonance control signals, pulse control signals, first output voltage, and second output voltage. The bias power has a non-sinusoidal voltage waveform during an entire time interval and a sinusoidal voltage waveform during a partial time interval.
- Resonance module circuit with multiple control switches
- Pulse module circuit with multiple control switches
- Generation of bias power based on control signals and output voltages
- Non-sinusoidal and sinusoidal voltage waveforms in bias power
Potential Applications
The technology described in this patent application could be applied in:
- Renewable energy systems
- Power electronics
- Electric vehicle charging systems
Problems Solved
This technology addresses issues related to:
- Efficient power generation
- Voltage waveform control
- Energy conversion
Benefits
The benefits of this technology include:
- Improved power generation efficiency
- Enhanced voltage waveform control
- Increased energy conversion rates
Potential Commercial Applications
The potential commercial applications of this technology could be in:
- Power generation equipment manufacturing
- Renewable energy industry
- Electric vehicle infrastructure development
Possible Prior Art
One possible prior art related to this technology is the use of resonant converters in power electronics for efficient energy conversion.
Unanswered Questions
How does this technology compare to traditional power generation methods?
This article does not provide a direct comparison between this technology and traditional power generation methods.
What are the specific industries that could benefit the most from this innovation?
The article does not specify the specific industries that could benefit the most from this innovation.
Original Abstract Submitted
a power generator with partial sinusoidal waveform includes a resonance module circuit and a pulse module circuit. the resonance module circuit includes a plurality of resonance control switches, and generates a first output voltage by selectively turning on and off the plurality of resonance control switches based on a plurality of resonance control signals. the pulse module circuit includes a plurality of pulse control switches, and generates a second output voltage by selectively turning on and off the plurality of pulse control switches based on a plurality of pulse control signals. the power generator generates a bias power based on the plurality of resonance control signals, the plurality of pulse control signals, the first output voltage and the second output voltage. the bias power has a non-sinusoidal voltage waveform during an entire time interval and a sinusoidal voltage waveform during a partial time interval.
