Samsung electronics co., ltd. (20240116184). AUTOMATED GAS SUPPLY SYSTEM simplified abstract

AUTOMATED GAS SUPPLY SYSTEM

Organization Name

samsung electronics co., ltd.

Inventor(s)

Min Sung Ha of Seoul (KR)

Kwang-Jun Kim of Ansan-si (KR)

Jong Kyu Kim of Suwon-si (KR)

Hyun-Joong Kim of Seongnam-si (KR)

Jin Ho So of Seoul (KR)

Chi-Gun An of Suwon-si (KR)

Ki Moon Lee of Seoul (KR)

Hui Gwan Lee of Suwon-si (KR)

Beom Soo Hwang of Seoul (KR)

AUTOMATED GAS SUPPLY SYSTEM - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240116184 titled 'AUTOMATED GAS SUPPLY SYSTEM

Simplified Explanation

The automated gas supply system described in the patent application includes several key components:

• Gas cylinder transfer unit: Transfers a cradle containing one or more gas cylinders storing gas.
• Gas cylinder inspection unit: Checks properties of the gas in the transferred cylinder and detects leaks.
• Storage queue: Receives gas cylinders from the inspection unit via a mobile robot, classifies them based on gas properties, and stores them.
• Gas cabinet: Receives gas cylinders from the storage queue via the mobile robot, connects a gas pipe to a gas spray nozzle, and supplies the gas to a semiconductor manufacturing process line. It includes a residual gas detector to monitor gas levels in the cylinder.

Potential Applications: - Semiconductor manufacturing - Industrial gas supply systems - Automated manufacturing processes

Problems Solved: - Efficient gas cylinder inspection and storage - Automated gas supply to manufacturing processes - Monitoring residual gas levels for safety and quality control

Benefits: - Increased efficiency in gas supply operations - Improved safety through leak detection and residual gas monitoring - Streamlined manufacturing processes

Potential Commercial Applications: "Automated Gas Supply System for Semiconductor Manufacturing Processes"

Possible Prior Art: - Automated gas cylinder transfer systems in industrial settings - Gas storage and supply systems with leak detection capabilities

Unanswered Questions: 1. How does the system handle different types of gases with varying properties? 2. What is the maintenance schedule for the gas cylinder inspection unit and residual gas detector?

Original Abstract Submitted

an automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a residual gas detector configured to detect a residual amount of the gas stored in the gas cylinder fastened to the gas pipe, and when the residual amount of the gas detected by the residual gas detector is less than or equal to a set residual amount of gas, the mobile robot recovers the gas cylinder from inside the gas cabinet and transfers a gas cylinder stored in the storage queue to the gas cabinet.