Samsung display co., ltd. (20240118221). LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTALLIZATION MONITORING USING THE SAME simplified abstract

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LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTALLIZATION MONITORING USING THE SAME

Organization Name

samsung display co., ltd.

Inventor(s)

JI-HWAN Kim of Yongin-si (KR)

LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTALLIZATION MONITORING USING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240118221 titled 'LASER CRYSTALLIZATION MONITORING DEVICE AND METHOD OF LASER CRYSTALLIZATION MONITORING USING THE SAME

Simplified Explanation

The abstract describes a laser crystallization monitoring device that includes a stage for supporting a substrate, a laser beam generator, a rotating mirror, telecentric f-theta lenses, and a monitor for inspecting the laser beam passing through the lenses.

  • Stage for supporting substrate
  • Laser beam generator
  • Rotating mirror
  • Telecentric f-theta lenses
  • Monitor for inspecting laser beam

Potential Applications

This technology could be used in the manufacturing of electronic devices, such as displays and sensors, where precise laser crystallization is required.

Problems Solved

This technology solves the problem of monitoring and controlling the laser crystallization process in real-time, ensuring the quality and consistency of the crystallized material.

Benefits

The benefits of this technology include improved efficiency in the crystallization process, higher quality end products, and the ability to adjust parameters for optimal results.

Potential Commercial Applications

  • Display manufacturing
  • Semiconductor fabrication
  • Sensor production

Possible Prior Art

One possible prior art could be laser annealing systems used in semiconductor manufacturing processes.

Unanswered Questions

How does this technology compare to traditional methods of crystallization monitoring?

This technology offers real-time monitoring capabilities, which traditional methods may not provide. It allows for precise control and adjustment of parameters during the crystallization process.

What are the limitations of this laser crystallization monitoring device?

The limitations of this device may include the cost of implementation and maintenance, as well as the complexity of the system which may require specialized training for operators.


Original Abstract Submitted

a laser crystallization monitoring device includes a stage that supports a substrate, a laser beam generator that emits a laser beam to the substrate, a mirror that reflects the laser beam emitted from the laser beam generator and that rotates around a rotation axis, a first telecentric f-theta lens located on the laser beam path between the mirror and the substrate, a second telecentric f-theta lens through which the laser beam reflected from the substrate passes, and a monitor that inspects the laser beam passing through the second telecentric f-theta lens.