SEMES CO., LTD. patent applications published on March 21st, 2024
Contents
- 1 Patent applications for SEMES CO., LTD. on March 21st, 2024
- 1.1 FILTER FLUSHING DEVICE AND FILTER FLUSHING METHOD (18354823)
- 1.2 SUBSTRATE PROCESSING APPARATUS INCLUDING NOZZLE UNIT AND SUBSTRATE PROCESSING METHOD (18117592)
- 1.3 LIQUID CHEMICAL TANK MODULE AND LIQUID CHEMICAL SUPPLY APPARATUS INCLUDING THE SAME (18239503)
- 1.4 CHEMICAL LIQUID REMOVING UNIT, DEVICE FOR SUPPLYING CHEMICAL LIQUID AND METHOD OF REMOVING CHEMICAL LIQUID (18462581)
- 1.5 SUBSTRATE PROCESSING APPARATUS AND METHOD (18240007)
- 1.6 SUBSTRATE PROCESSING APPARATUS AND METHOD (18458252)
- 1.7 DRYING APPARATUS AND SUBSTRATE TREATING APPARATUS (18120981)
- 1.8 APPARATUS FOR TREATING SUBSTRATE (18469755)
- 1.9 WAFER HEATING APPARATUS AND WAFER PROCESSING APPARATUS USING THE SAME (18126933)
- 1.10 CONTAINER RELAY UNIT AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME (18225133)
Patent applications for SEMES CO., LTD. on March 21st, 2024
FILTER FLUSHING DEVICE AND FILTER FLUSHING METHOD (18354823)
Main Inventor
Byungwoo SIM
SUBSTRATE PROCESSING APPARATUS INCLUDING NOZZLE UNIT AND SUBSTRATE PROCESSING METHOD (18117592)
Main Inventor
Ju Hwan LEE
LIQUID CHEMICAL TANK MODULE AND LIQUID CHEMICAL SUPPLY APPARATUS INCLUDING THE SAME (18239503)
Main Inventor
Byungwoo SIM
CHEMICAL LIQUID REMOVING UNIT, DEVICE FOR SUPPLYING CHEMICAL LIQUID AND METHOD OF REMOVING CHEMICAL LIQUID (18462581)
Main Inventor
Chulwoo KIM
SUBSTRATE PROCESSING APPARATUS AND METHOD (18240007)
Main Inventor
Hyunjik JUNG
SUBSTRATE PROCESSING APPARATUS AND METHOD (18458252)
Main Inventor
Ho Chul CHOI
DRYING APPARATUS AND SUBSTRATE TREATING APPARATUS (18120981)
Main Inventor
HAE-WON CHOI
APPARATUS FOR TREATING SUBSTRATE (18469755)
Main Inventor
Dong-Hun KIM
WAFER HEATING APPARATUS AND WAFER PROCESSING APPARATUS USING THE SAME (18126933)
Main Inventor
Soo Han SONG
CONTAINER RELAY UNIT AND LOGISTICS TRANSPORT SYSTEM INCLUDING THE SAME (18225133)
Main Inventor
Myeong Jin BANG
