Google llc (20240134271). FABRICATION OF NANOIMPRINT WORKING STAMPS WITH COMBINED PATTERNS FROM MULTIPLE MASTER STAMPS simplified abstract

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FABRICATION OF NANOIMPRINT WORKING STAMPS WITH COMBINED PATTERNS FROM MULTIPLE MASTER STAMPS

Organization Name

google llc

Inventor(s)

Lu Tian of Palo Alto CA (US)

Wei Jin of Saratoga CA (US)

Thomas Mercier of Weston FL (US)

FABRICATION OF NANOIMPRINT WORKING STAMPS WITH COMBINED PATTERNS FROM MULTIPLE MASTER STAMPS - A simplified explanation of the abstract

This abstract first appeared for US patent application 20240134271 titled 'FABRICATION OF NANOIMPRINT WORKING STAMPS WITH COMBINED PATTERNS FROM MULTIPLE MASTER STAMPS

Simplified Explanation

The method described in the abstract involves fabricating a working stamp for forming surface gratings in a waveguide workpiece through a series of step lithography processes using master stamps.

  • Pressing master stamps into a material layer of the working stamp workpiece at corresponding regions to form surface grating patterns.
  • Applying ultraviolet light to cure the material layer locally at the corresponding regions.
  • Detaching the master stamp from the material of the working stamp after applying the ultraviolet light.

Potential Applications

This technology can be applied in the manufacturing of waveguides, optical devices, and sensors that require precise surface gratings for functionality.

Problems Solved

This method solves the problem of efficiently and accurately fabricating working stamps with surface gratings for waveguide applications.

Benefits

The benefits of this technology include improved precision, repeatability, and scalability in the fabrication of waveguide components with surface gratings.

Potential Commercial Applications

Potential commercial applications of this technology include the production of waveguide components for telecommunications, optical networking, and sensing devices.

Possible Prior Art

Prior art may include similar methods for fabricating surface gratings in waveguide components using lithography processes, but the specific technique described in this patent application may offer unique advantages in terms of efficiency and precision.

Unanswered Questions

How does this method compare to traditional methods of fabricating surface gratings in waveguide components?

This article does not provide a direct comparison to traditional methods of fabricating surface gratings in waveguide components.

What are the limitations of this method in terms of scalability and cost-effectiveness?

This article does not address the limitations of this method in terms of scalability and cost-effectiveness.


Original Abstract Submitted

a method for fabricating a working stamp for forming surface gratings in a waveguide workpiece includes performing a series of step lithography processes using a series of master stamps so as to form a working stamp having a first surface having a plurality of surface gratings formed therein. each step lithography process includes pressing a master stamp of the series of master stamps into a material layer of a working stamp workpiece at a corresponding region of the material layer, the master stamp having a plurality of surface grating patterns formed thereon. each step lithography process further includes applying ultraviolet light to the corresponding region to locally cure the material layer at the corresponding region and detaching the master stamp from the material of the working stamp after applying the ultraviolet light.