18518573. THIN FILM TRANSISTOR, SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THIN FILM TRANSISTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

THIN FILM TRANSISTOR, SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THIN FILM TRANSISTOR

Organization Name

Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor(s)

Neil Quinn Murray of Hsinchu City (TW)

Hung-Wei Li of Hsinchu (TW)

Mauricio Manfrini of Hsinchu County (TW)

Sai-Hooi Yeong of Hsinchu County (TW)

THIN FILM TRANSISTOR, SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THIN FILM TRANSISTOR - A simplified explanation of the abstract

This abstract first appeared for US patent application 18518573 titled 'THIN FILM TRANSISTOR, SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THIN FILM TRANSISTOR

Simplified Explanation

The abstract describes a patent application for a thin film transistor and a method of fabricating it. The thin film transistor includes various layers and components such as gate metal, gate dielectric layer, semiconductor layer, interlayer dielectric, source/drain metal, liners, and contact holes.

• Gate metal, gate dielectric layer, semiconductor layer, interlayer dielectric, source/drain metal, liners, and contact holes are key components of the thin film transistor.
• The method of fabricating the thin film transistor involves the precise deposition and arrangement of these layers and components to ensure proper functionality.

Potential Applications

The thin film transistor technology can be applied in various electronic devices such as displays, sensors, and integrated circuits.

Problems Solved

This technology solves the problem of achieving high-performance and reliable semiconductor devices in a thin and compact form factor.

Benefits

The benefits of this technology include improved device performance, reduced power consumption, and increased device integration density.

Potential Commercial Applications

The thin film transistor technology can be commercialized in the manufacturing of advanced electronic devices for consumer electronics, medical devices, and industrial applications.

Possible Prior Art

Prior art in thin film transistor technology includes research and patents related to semiconductor device fabrication, thin film deposition techniques, and integrated circuit design.

How does the thin film transistor technology compare to traditional silicon-based transistors in terms of performance and efficiency?

The article does not provide a direct comparison between thin film transistors and traditional silicon-based transistors in terms of performance and efficiency. Further research and analysis would be needed to address this question.

What are the potential limitations or challenges in scaling up the production of thin film transistors for mass manufacturing?

The article does not discuss the potential limitations or challenges in scaling up the production of thin film transistors for mass manufacturing. Additional studies and industry insights would be required to explore this aspect further.

Original Abstract Submitted

A thin film transistor, a semiconductor device having a thin film transistor and a method of fabricating a thin film transistor are provided. The thin film transistor includes a gate metal; a gate dielectric layer disposed on the gate metal; a semiconductor layer disposed on the gate dielectric layer; an interlayer dielectric disposed on the semiconductor layer and having a contact hole over the semiconductor layer; a source/drain metal disposed in the contact hole; a first liner disposed between the interlayer dielectric and the source/drain metal; and a second liner disposed between the first liner and the source/drain metal and being in contact with the semiconductor layer in the contact hole.