18484562. APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
Contents
- 1 APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Original Abstract Submitted
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
Organization Name
Inventor(s)
Sang Hyuk Park of Suwon-si (KR)
Kyu-Sik Jeong of Suwon-si (KR)
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 18484562 titled 'APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
Simplified Explanation
The patent application describes an apparatus for manufacturing a semiconductor device, including a substrate transfer unit, a rail unit, and a lifting unit.
- The substrate transfer unit transfers the substrate.
- The rail unit consists of a driving rail and a stopper to guide the movement of the substrate transfer unit.
- The lifting unit moves in multiple directions to remove the substrate transfer unit from the rail unit, contacting the stopper to open it.
Potential Applications
This technology could be applied in semiconductor manufacturing processes that require precise substrate handling and movement.
Problems Solved
1. Ensures accurate and efficient transfer of substrates during the manufacturing process. 2. Facilitates the removal of the substrate transfer unit from the rail unit for maintenance or replacement.
Benefits
1. Improved precision in substrate handling. 2. Enhanced productivity in semiconductor device manufacturing. 3. Simplified maintenance procedures for the apparatus.
Potential Commercial Applications
Optimizing Semiconductor Device Manufacturing Processes with Advanced Substrate Handling Technology
Possible Prior Art
There may be existing patents or technologies related to substrate transfer units in semiconductor manufacturing processes, but specific prior art is not provided in this abstract.
Unanswered Questions
How does this apparatus improve the overall efficiency of semiconductor device manufacturing processes?
This apparatus enhances efficiency by ensuring precise substrate handling and facilitating easy removal of the substrate transfer unit for maintenance or replacement.
What are the specific technical specifications of the rail unit and lifting unit in this apparatus?
The abstract does not provide detailed technical specifications of the rail unit and lifting unit, which would be crucial for understanding the functionality and design of the apparatus.
Original Abstract Submitted
An apparatus for manufacturing a semiconductor device includes a substrate transfer unit configured to transfer a substrate, a rail unit including a driving rail extending in a first direction that the substrate transfer unit moves and a stopper on a side of the driving rail in a second direction crossing the first direction, and a lifting unit configured to move in the first direction and a third direction perpendicular to the first and second directions to remove the substrate transfer unit from the rail unit, wherein the lifting unit is configured to contact the stopper to move the stopper from a closed state to an open state.
