18483050. SUBSTRATE PROCESSING APPARATUS simplified abstract (Tokyo Electron Limited)
Contents
- 1 SUBSTRATE PROCESSING APPARATUS
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 SUBSTRATE PROCESSING APPARATUS - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
SUBSTRATE PROCESSING APPARATUS
Organization Name
Inventor(s)
Masato Kadobe of Fuchu City (JP)
Hiromi Nitadori of Oshu City (JP)
Takahiro Abe of Fuchu City (JP)
Junichi Sato of Oshu City (JP)
SUBSTRATE PROCESSING APPARATUS - A simplified explanation of the abstract
This abstract first appeared for US patent application 18483050 titled 'SUBSTRATE PROCESSING APPARATUS
Simplified Explanation
The patent application describes a substrate processing apparatus with a loading/unloading part, a substrate transfer part, and multiple batch processors for processing substrates.
- Loading/unloading part:
* Includes first and second transfer devices for moving containers. * First area with first storage shelves and second area with second storage shelves for storing containers. * Movable shelf that can move between the first and second areas.
Potential Applications
The technology can be applied in semiconductor manufacturing, solar panel production, and other industries requiring precise substrate processing.
Problems Solved
1. Efficient loading and unloading of substrates. 2. Optimized use of space with movable shelves for storage.
Benefits
1. Increased productivity with multiple batch processors. 2. Improved organization and accessibility with storage shelves. 3. Streamlined substrate processing with the loading/unloading part.
Potential Commercial Applications
Optimizing substrate processing in semiconductor fabrication plants for increased efficiency and productivity.
Possible Prior Art
Prior art may include similar substrate processing apparatus with loading/unloading parts and batch processors, but the specific design and features of this patent application may be novel.
Unanswered Questions
How does the movable shelf operate between the first and second areas?
The patent application does not provide detailed information on the mechanism of the movable shelf.
Are there any safety features incorporated into the loading/unloading part?
The patent application does not mention any safety features that may be included in the apparatus.
Original Abstract Submitted
A substrate processing apparatus includes: a loading/unloading part having a first side surface into or from which a container accommodating a substrate is loaded or unloaded and a second side surface opposite to the first side surface; a substrate transfer part extending in a first direction orthogonal to the second side surface; and a plurality of batch processors adjacent to each other in a length direction of the substrate transfer part. The loading/unloading part includes: a first transfer device and a second transfer device configured to transfer the container; a first area accessible to the first transfer device and having a plurality of first storage shelves configured to store the container, a second area accessible to the second transfer device and having a plurality of second storage shelves configured to store the container; and a movable shelf configured to be movable between the first area and the second area.
