18481559. MICROMECHANICAL SENSOR HAVING INCREASED SENSITIVITY AND A MEMS COMPONENT HAVING SUCH A SENSOR simplified abstract (Robert Bosch GmbH)

MICROMECHANICAL SENSOR HAVING INCREASED SENSITIVITY AND A MEMS COMPONENT HAVING SUCH A SENSOR

Organization Name

Robert Bosch GmbH

Inventor(s)

Daniel Gyorgy Kalacska of Budapest (HU)

MICROMECHANICAL SENSOR HAVING INCREASED SENSITIVITY AND A MEMS COMPONENT HAVING SUCH A SENSOR - A simplified explanation of the abstract

This abstract first appeared for US patent application 18481559 titled 'MICROMECHANICAL SENSOR HAVING INCREASED SENSITIVITY AND A MEMS COMPONENT HAVING SUCH A SENSOR

Simplified Explanation

The micro-electromechanical sensor described in the patent application is a sensor element designed in the shape of a rocker with a light side and a heavy side, where the light side has a smaller layer thickness in at least one functional region than the heavy side. The sensor element includes an opening with a flexible stop structure and a reinforcing structure surrounding the opening, realized by an alternating sequence of anchor segments and connecting segments, where the connecting segments have a smaller width than the anchor segments.

• The sensor element is designed as a rocker with a light side and a heavy side.
• The light side has a smaller layer thickness in at least one functional region than the heavy side.
• An opening with a flexible stop structure is formed in the functional region.
• A reinforcing structure, made up of anchor segments and connecting segments, surrounds the opening.

Potential Applications

This technology could be used in:

• Accelerometers
• Gyroscopes
• Pressure sensors

Problems Solved

This technology solves issues related to:

• Sensing accuracy
• Miniaturization of sensors
• Resilient deflection of sensor elements

Benefits

The benefits of this technology include:

• Improved sensor performance
• Enhanced durability
• Increased sensitivity

Potential Commercial Applications

This technology could be applied in various industries such as:

• Automotive
• Aerospace
• Consumer electronics

Possible Prior Art

One possible prior art for this technology could be the use of MEMS sensors in various electronic devices and systems.

How does this technology compare to existing MEMS sensor designs in terms of sensitivity and accuracy?

This article does not provide a direct comparison between this technology and existing MEMS sensor designs in terms of sensitivity and accuracy. Further research or testing may be needed to determine the performance differences between them.

What are the potential limitations or challenges in implementing this technology in mass production?

The article does not address the potential limitations or challenges in implementing this technology in mass production. Factors such as cost, scalability, and manufacturing processes could be important considerations that are not covered in the patent application.

Original Abstract Submitted

A micro-electromechanical sensor. The micro-electromechanical sensor includes a substrate and a sensor element that can be resiliently deflected relative to the substrate is described. The sensor element is designed in the shape of a rocker having a light side and a heavy side, wherein the light side of the sensor element has a smaller layer thickness in at least one functional region than has the heavy side of the sensor element. An opening having a flexible stop structure is formed in the functional region. A reinforcing structure at least partially surrounding the opening is also provided in the functional region. The reinforcing structure is at least partially realized by an alternating sequence of anchor segments and connecting segments. The connecting segments have a smaller width than the anchor segments.