18469684. SUBSTRATE LOADING DEVICE AND SUBSTRATE LOADING METHOD USING THE SAME simplified abstract (Samsung Display Co., Ltd.)

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SUBSTRATE LOADING DEVICE AND SUBSTRATE LOADING METHOD USING THE SAME

Organization Name

Samsung Display Co., Ltd.

Inventor(s)

JUNHYEUK Ko of Yongin-si (KR)

MINGOO Kang of Yongin-si (KR)

MINSEOK Kim of Yongin-si (KR)

MINCHUL Song of Yongin-si (KR)

Sukha Ryu of Yongin-si (KR)

EUIGYU Kim of Yongin-si (KR)

SUBSTRATE LOADING DEVICE AND SUBSTRATE LOADING METHOD USING THE SAME - A simplified explanation of the abstract

This abstract first appeared for US patent application 18469684 titled 'SUBSTRATE LOADING DEVICE AND SUBSTRATE LOADING METHOD USING THE SAME

Simplified Explanation

The substrate loading device described in the patent application includes an electrostatic chuck that holds a substrate, a mask frame with a flat top surface, and multiple holders positioned between the electrostatic chuck and the mask frame. Each holder consists of three connection parts that allow for rotational movement between a position over the substrate and a position away from the substrate.

  • Electrostatic chuck for holding the substrate securely in place.
  • Mask frame with a flat top surface for accurate positioning.
  • Holders with multiple connection parts for rotational movement.
  • Ability to move between a position over the substrate and a position away from the substrate.

Potential Applications

The technology described in the patent application could be used in semiconductor manufacturing, photolithography processes, and other industries where precise substrate positioning is crucial.

Problems Solved

This technology solves the problem of accurately loading and positioning substrates for various manufacturing processes, ensuring consistent and high-quality results.

Benefits

The benefits of this technology include improved accuracy, efficiency, and reliability in substrate loading, leading to enhanced overall productivity and product quality.

Potential Commercial Applications

Aerospace industry: for precise alignment of components. Automotive industry: for accurate positioning of parts during manufacturing processes. Medical devices: for consistent and reliable substrate loading in medical equipment production.

Possible Prior Art

One possible prior art could be a similar substrate loading device with holders for rotational movement, but without the specific design features described in this patent application.

Unanswered Questions

1. How does the rotational movement of the holders contribute to the overall functionality of the substrate loading device? 2. Are there any specific industries or applications where this technology would not be suitable or effective?


Original Abstract Submitted

A substrate loading device includes an electrostatic chuck that chucks a substrate, a mask frame disposed under the electrostatic chuck, and including an edge having a flat top surface, and a plurality of holders disposed between the electrostatic chuck and the mask frame. Each of the plurality of holders includes a first connection part connected to a side of the electrostatic chuck, a second connection part connected to the first connection part and extending in a direction intersecting an extension direction of the first connection part, and a third connection part connected to the second connection part, extending in a direction intersecting an extension direction of the second connection part, and rotationally moving between a first position overlapping the substrate in a thickness direction of the substrate and a second position spaced apart from the substrate.