18349460. NON-VOLATILE MEMORY DEVICE, METHOD FOR MANUFACTURING THE NON-VOLATILE MEMORY DEVICE, AND ELECTRONIC SYSTEM INCLUDING THE NON-VOLATILE MEMORY DEVICE simplified abstract (Samsung Electronics Co., Ltd.)

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NON-VOLATILE MEMORY DEVICE, METHOD FOR MANUFACTURING THE NON-VOLATILE MEMORY DEVICE, AND ELECTRONIC SYSTEM INCLUDING THE NON-VOLATILE MEMORY DEVICE

Organization Name

Samsung Electronics Co., Ltd.

Inventor(s)

Yeong Dong Mun of Suwon-si (KR)

Seong Hun Park of Suwon-si (KR)

Hauk Han of Suwon-si (KR)

Seong Jin Kim of Suwon-si (KR)

NON-VOLATILE MEMORY DEVICE, METHOD FOR MANUFACTURING THE NON-VOLATILE MEMORY DEVICE, AND ELECTRONIC SYSTEM INCLUDING THE NON-VOLATILE MEMORY DEVICE - A simplified explanation of the abstract

This abstract first appeared for US patent application 18349460 titled 'NON-VOLATILE MEMORY DEVICE, METHOD FOR MANUFACTURING THE NON-VOLATILE MEMORY DEVICE, AND ELECTRONIC SYSTEM INCLUDING THE NON-VOLATILE MEMORY DEVICE

Simplified Explanation

The non-volatile memory device described in the patent application includes a substrate with a mold structure, gate electrodes, mold insulating films, an interlayer insulating film, a channel structure, and a through-contact. The through-contact consists of a first portion with a multi-grain conductive material and a second portion with a single grain conductive material.

  • Substrate with mold structure, gate electrodes, and mold insulating films
  • Channel structure connected to gate electrodes
  • Through-contact with multi-grain and single grain conductive materials

Potential Applications

The technology described in this patent application could be applied in:

  • Non-volatile memory devices
  • Semiconductor manufacturing

Problems Solved

This technology helps address issues related to:

  • Improving memory device performance
  • Enhancing data storage capabilities

Benefits

The benefits of this technology include:

  • Increased memory device efficiency
  • Enhanced data retention capabilities

Potential Commercial Applications

The potential commercial applications of this technology could be in:

  • Memory chip manufacturing industry
  • Electronic device production

Possible Prior Art

One possible prior art for this technology could be the use of multi-grain conductive materials in through-contacts in semiconductor devices.

Unanswered Questions

1. How does the use of multi-grain conductive materials in through-contacts impact the overall performance of the non-volatile memory device? 2. Are there any specific challenges in manufacturing memory devices with through-contacts containing both multi-grain and single grain conductive materials?


Original Abstract Submitted

A non-volatile memory device including a substrate including a first area and a second area, a mold structure on the substrate, the mold structure including gate electrodes and mold insulating films alternately stacked on each other in a stepwise manner, an interlayer insulating film covering the mold structure, a channel structure on the first area, the channel structure extending through the mold structure and connected to the gate electrodes, and a through-contact on the second area and extending through the interlayer insulating film, the through-contact including a first portion in a first trench and a second portion in a second trench, the first portion including a liner film along a sidewall and a bottom surface of the first trench and a filling film on the liner film, wherein the filling film being a multi-grain conductive material, and the second portion being a single grain conductive material, may be provided.