18198624. POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)
Contents
- 1 POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
- 1.1 Organization Name
- 1.2 Inventor(s)
- 1.3 POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME - A simplified explanation of the abstract
- 1.4 Simplified Explanation
- 1.5 Potential Applications
- 1.6 Problems Solved
- 1.7 Benefits
- 1.8 Potential Commercial Applications
- 1.9 Possible Prior Art
- 1.10 Unanswered Questions
- 1.11 Original Abstract Submitted
POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
Organization Name
Inventor(s)
POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME - A simplified explanation of the abstract
This abstract first appeared for US patent application 18198624 titled 'POWER GENERATOR WITH PARTIAL SINUSOIDAL WAVEFORM, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
Simplified Explanation
The power generator described in the abstract combines a resonance module circuit and a pulse module circuit to generate bias power with a partial sinusoidal waveform. The resonance module circuit includes multiple resonance control switches that generate a first output voltage based on resonance control signals. The pulse module circuit includes multiple pulse control switches that generate a second output voltage based on pulse control signals. The bias power is generated using these signals and voltages, resulting in a non-sinusoidal waveform during one time interval and a sinusoidal waveform during another.
- Resonance module circuit with multiple control switches
- Pulse module circuit with multiple control switches
- Generation of bias power with partial sinusoidal waveform
- Non-sinusoidal waveform during one time interval, sinusoidal waveform during another
Potential Applications
The technology could be applied in power generation systems, renewable energy sources, and electrical equipment requiring precise voltage control.
Problems Solved
This innovation addresses the challenge of generating power with a specific waveform, combining non-sinusoidal and sinusoidal characteristics for different applications.
Benefits
- Precise control over voltage waveforms - Versatile power generation capabilities - Efficient energy conversion
Potential Commercial Applications
"Partial Sinusoidal Waveform Power Generator Technology for Renewable Energy Systems"
Possible Prior Art
Prior art may include patents or research on power generators with waveform control capabilities, resonance circuits, and pulse modulation techniques.
Unanswered Questions
How does the technology impact energy efficiency in power generation systems?
The article does not delve into the specific efficiency gains or losses associated with this technology.
Are there any limitations to the partial sinusoidal waveform generated by this power generator?
The article does not mention any potential drawbacks or limitations of the partial sinusoidal waveform produced by the power generator.
Original Abstract Submitted
A power generator with partial sinusoidal waveform includes a resonance module circuit and a pulse module circuit. The resonance module circuit includes a plurality of resonance control switches, and generates a first output voltage by selectively turning on and off the plurality of resonance control switches based on a plurality of resonance control signals. The pulse module circuit includes a plurality of pulse control switches, and generates a second output voltage by selectively turning on and off the plurality of pulse control switches based on a plurality of pulse control signals. The power generator generates a bias power based on the plurality of resonance control signals, the plurality of pulse control signals, the first output voltage and the second output voltage. The bias power has a non-sinusoidal voltage waveform during an entire time interval and a sinusoidal voltage waveform during a partial time interval.
